Coverart for item
The Resource Handbook of silicon based MEMS materials and technologies, Veikko Lindroos ... [et al.], (electronic resource)

Handbook of silicon based MEMS materials and technologies, Veikko Lindroos ... [et al.], (electronic resource)

Label
Handbook of silicon based MEMS materials and technologies
Title
Handbook of silicon based MEMS materials and technologies
Statement of responsibility
Veikko Lindroos ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CaPaEBR
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Lindroos, Veikko
  • ebrary, Inc
Series statement
Micro & nano technologies
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Microelectromechanical systems
  • Silicon
Label
Handbook of silicon based MEMS materials and technologies, Veikko Lindroos ... [et al.], (electronic resource)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10378866
Dimensions
unknown
Edition
1st ed
Extent
xxxii, 636 p.
Form of item
electronic
Other physical details
ill
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
(OCoLC)667288128
Label
Handbook of silicon based MEMS materials and technologies, Veikko Lindroos ... [et al.], (electronic resource)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10378866
Dimensions
unknown
Edition
1st ed
Extent
xxxii, 636 p.
Form of item
electronic
Other physical details
ill
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
(OCoLC)667288128

Library Locations

    • Copley LibraryBorrow it
      5998 Alcalá Park, San Diego, CA, 92110-2492, US
      32.771354 -117.193327
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