Coverart for item
The Resource Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium, edited by Paul Mertens, Marc Meuris and Marc Heyns

Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium, edited by Paul Mertens, Marc Meuris and Marc Heyns

Label
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium
Title
Ultra clean processing of semiconductor surfaces XII
Title remainder
selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium
Statement of responsibility
edited by Paul Mertens, Marc Meuris and Marc Heyns
Creator
Contributor
Editor
Subject
Genre
Language
eng
Member of
Cataloging source
CaPaEBR
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2014
http://bibfra.me/vocab/lite/meetingName
International Symposium on Ultra Clean Processing of Semiconductor Surfaces
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Mertens, Paul
  • Meuris, Marc
  • Heyns, Marc
Series statement
Solid State Phenomena,
Series volume
Volume 219
http://library.link/vocab/subjectName
Semiconductors
Label
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium, edited by Paul Mertens, Marc Meuris and Marc Heyns
Instantiates
Publication
Distribution
Copyright
Bibliography note
Includes bibliographical references at the end of each chapters and index
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type MARC source
rdacontent
Control code
ebr10951269
Dimensions
unknown
Extent
1 online resource (331 pages)
Form of item
online
Isbn
9783038266266
Isbn Type
(e-book)
Media category
computer
Media MARC source
rdamedia
Note
Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries
Other physical details
illustrations
Specific material designation
remote
System control number
(OCoLC)893677848
Label
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium, edited by Paul Mertens, Marc Meuris and Marc Heyns
Publication
Distribution
Copyright
Bibliography note
Includes bibliographical references at the end of each chapters and index
Carrier category
online resource
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type MARC source
rdacontent
Control code
ebr10951269
Dimensions
unknown
Extent
1 online resource (331 pages)
Form of item
online
Isbn
9783038266266
Isbn Type
(e-book)
Media category
computer
Media MARC source
rdamedia
Note
Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries
Other physical details
illustrations
Specific material designation
remote
System control number
(OCoLC)893677848

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